Vacuum Load Lock Door

Quick access doors provide convenient and fast manual loading of samples in and out of vacuum chambers.

Vacuum load lock door.

All access doors are supplied with viton elastomer seals suitable for high vacuum service. 022 transfer valve monovat direct for load lock and process chamber isolation in semiconductor production systems for 200 300 and 450 mm wafers. 30ºc maximum when attached. See quick access doors section vacuum range.

For complete instructions and parts needed to fix your door locks and other related vacuum problems go here. Enable quick and convenient access into vacuum vessels such as process chambers and load locks. For conversion tables click here. Viewport fitted doors are constructed with corning type 7056 glass fused to a kovar nickel iron transition sleeve.

A range of options exist for e g. Doors are hinged and fitted with a swingaway hand knob locking mechanism. Precision hinged access doors seal with a fluorocarbon o ring. Offered in a wide range of uhv flange sizes with or without viewport glass.

Bolt kits for quick access doors with clearance holes. Fast entry access load lock doors hardware replacement parts contact us to contact someone directly please click here or call 1 412 387 9200 to get in contact with your dedicated sales team. For load lock and process chamber isolation in semiconductor production systems for 200 and 300 mm wafers. They are designed for base pressures between 1x10 7 mbar and 1x10 9 mbar.

1x10 10 torr temperature range 20ºc to 150ºc magnets must be removed for 150ºc rating. Viewport fitted doors are constructed with corning type 7056 glass fused to a kovar nickel iron transition sleeve. Ln 2 cooling or heating samples up to 600 c. The top port of the load lock chamber mechanism is usually sealed by a viton gasket.

Mdc vacuum products llc is an iso 9001 2015 certified company. Load lock chambers are provided with a six inch cf flange for mounting to the gate valve a six inch add a door with 7056 glass viewport a 2 75 inch cf flange for attachment of the linear feedthrough and two 2 75 inch cf flanges for pumping. Description quick access doors provide convenient and fast manual loading of samples in and out of vacuum chambers.